Abstract

A scanning spectral-analysis micro-probe subsystem for surface imaging.

Inventors

Charles L. Dumoulin
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Patent Details

Patent Number: US 5060248 A

Filing Date: 1990-06-29

Publication Date: 1991-10-22

Status: Expired – Lifetime

Current Assignee: SABIC Global Technologies BV / General Electric Co

Applicants: General Electric Co.

IPC/CPC Classifications: G01N23/06;;G01N27/00;;G01Q

Patent Attorney
Lawrence P. Zale

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